EBAPS器件中陶瓷基座与CMOS硅基芯片的粘接

Bonding of Ceramic Substrate and CMOS Chip of EBAPS Devices

  • 摘要: EBAPS(Electron Bombardment Active Pixel Sensor)是一种真空与固体器件结合的混合型光电成像器件,其真空封接需要经过高温烘烤和排气工艺,在研制过程中需要解决CMOS(Complementary Metal Oxide Semiconductor)图像传感器中硅基芯片与陶瓷基座之间粘接用的环氧树脂胶高温分解导致CMOS芯片脱落无法成像的问题。为了解决上述问题,项目组采用三种熔点相近的Au88Ge12、Pb92.5In5Ag2.5以及Zn-Al-Ag-Cu合金焊料焊接经过金属化后的CMOS硅基芯片和陶瓷基座。对上述3种焊料焊接的CMOS图像传感器剖面进行了SEM(Scanning Electron Microscope)和EDS(Energy Dispersive Spectrometer)测试表征,以分析焊接处的性能。结果表明,使用Au88Ge12焊接的CMOS图像传感器可以实现稳定可靠的连接性能。

     

    Abstract: An electron bombardment active pixel sensor (EBAPS) is a hybrid optoelectronic imaging device that combines vacuum and solid-state devices. Its vacuum sealing requires high-temperature baking and degassing processes. During development, a key challenge is addressing the issue of the epoxy adhesive used to bond the silicon-based chip in the complementary metal oxide semiconductor (CMOS) image sensor to the ceramic base, which may decompose at high temperatures, causing the CMOS chip to detach and fail to capture images. To address this, the project team used three types of solder alloys with similar melting points: Au88Ge12, Pb92.5In5Ag2.5, and Zn-Al-Ag-Cu to bond the metallized CMOS silicon-based chip to the ceramic base. The cross-sections of the CMOS image sensors soldered with these three types of solders were tested and characterized using scanning electron microscopy (SEM) and energy dispersive spectrometry (EDS) to analyze the performance of the solder joints. The results indicated that the CMOS image sensor soldered with Au88Ge12 achieved stable and reliable connection performance.

     

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